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Fully-automated High Voltage wafer-level testing | Tektronix

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Tektronix Solutions Power Efficiency Fully-automated High Voltage wafer-level testing Fully-automated High Voltage wafer-level testing Fully-automated HV wafer-level testing Increase throughput, reduce cost of test Lower cost of test, higher throughput Traditional test systems used for WLR, PCM, and Die-Sort do not have the measurement dynamic range or resolution to meet the new efficiency requirements (higher voltage, lower leakage current, lower on-resistance), or they require time-consuming manual reconfiguration to switch between low- and high-voltage tests. To meet your fab’s productivity goals, you can no longer afford to manually switch between two separate test systems for low voltage and high voltage semiconductor testing. Only Keithley can perform fully automatic wafer-level tests up to 3kV in a single probe touchdown.

Read more about trends in power efficiency

Learn how to: Move from high voltage to low voltage without changing test setup Measure capacitance without manual reconfiguration Fast automation Move from high voltage to low voltage without changing test set up. Perform all high- and low-voltage tests in a single pass without changing equipment or test setup. Get full 3kV sourcing capability combined with sub-pA measurement resolution, which eliminates the need to re-configure the test setup or use two separate test systems when moving from high voltage to low voltage breakdown tests. Minimize connectivity issues due to manual cabling and probing. Reduce false failures by ensuring high quality measurements. Safely rely on test results to adjust manufacturing process parameters to maximize yields.

High Voltage Wafer Testing in a Production Environment

More on the S540 Parametric Test System

In this breakdown test, voltage is ramped up to 1800 V at two different ramp rates, 20 ms and 100 ms per step. High ramp rate (slow delay time) increased the measured current from 100 pA to 1 nA. At the higher ramp rate, most of the current is the displacement current (~ 1 nA.)

Measure capacitance without manual reconfiguration Automate all Capacitance tests, including complex 3-terminal measurements. Fully automate 2- or 3-terminal transistor capacitance measurements to quickly evaluate switching characteristics such as speed, energy, and charge with Keithley’s high voltage switching matrix.

High Voltage Wafer Testing in a Production Environment

More on the S540 Parametric Test System

Perform transistor capacitance measurements
such as Ciss, Coss, and Crss up to 3 kV without manual reconfiguration of test pins

Fast automation

Sensitivity vs. typical execution time for connect-force-measure for different current levels.

Minimize test times, maximize test throughput and reduce cost of test with Keithley’s Test Script Processing (TSP) technology and virtual backplane (TSP-Link) that enables high-speed triggering, timing, and synchronization between all elements of the system.

Achieving Maximum Throughput with Keithley S530 Parametric Test Systems

More on the S530 Parametric Test System

Featured Content High Voltage Wafer Testing in a Production Environment Application note This application note explores several measurement techniques and approaches that enable automated HV wafer level characterization on multiple pins without sacrificing low voltage performance or throughput, as well as share results and experiences in the emerging field of HV wafer-level testing.

DOWNLOAD NOW Achieving Maximum Parametric Test Throughput Application note This application note addresses recent developments in system test speed optimization and offers general guidelines for test speed optimization at both the system and specific test algorithm level.

DOWNLOAD NOW Complete, single-pass parametric testing up to 3 kV S540

The 540 Parametric Test System is a fully-automated, 48 pin parametric test system for wafer-level testing of power semiconductor devices and structures up to 3kV.

Optimized for use with the latest compound power semiconductor materials including silicon carbide (SiC) and gallium nitride (GaN) Fully integrated to perform all high voltage, low voltage, and capacitance tests in a single probe touch-down. LEARN MORE

Test With More Accuracy and Fidelity S530

S530 Parametric Test Systems are designed for production and lab environments that must handle a broad range of devices and technologies, offering industry-leading test plan flexibility, automation, probe station integration, and test data management capabilities.

Readily adaptable to new devices and test requirements Fast, flexible, interactive test plan development Compatible with popular fully automatic probe stations Options for 1kV, C-V, pulse generation, frequency measurements, and low-voltage measurements LEARN MORE

Facing challenges in other power applications? Characterization of Power Semiconductor Devices Characterization and Troubleshooting of Power Conversion Designs Maximizing Battery Life of IoT Devices Technical Documents Videos Title MOSFET Testing System Flyer Learn more about integrated measurement systems for comprehensive characterization of power MOSFETs and other devices. Keithley Parametric Curve Tracer (PCT) systems offer a complete solution for high … Making Microsecond Pulse and AC Measurements with the S530 Parametric Test System by Integrating 4200A-SCS Parameter Analyzer Applications This application note describes how to generate microsecond pulsed I-V sweeps and tests, as well as make AC impedance measurements, with the S530 Parametric Test System by calling built-in user … Filter By All Video Multimedia Case Study Product News Product Demo Industry Comparison Product Features Testimonial How-To Apply

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